PSI - Issue 2_B

Toshiyuki Tsuchiya et al. / Procedia Structural Integrity 2 (2016) 1405–1412 Author name / Structural Integrity Procedia 00 (2016) 000 – 000

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process, and thinning by oxidation for 800-nm wire fabricated by the one-step Bosch process. The fabricated nanowires were 150~200 nm in cross-section size and 5 μ m long. The tensile strength of the two-step Bosch and oxidation thinned specimens were 1.6 and 2.6 GPa, respectively. Both the fractures would be caused by the surface defects originated from fabrication imperfections, which gives us a direction for improving strength of silicon nanowires. The proposed batch nanowire integration process to micro-scale MEMS will be useful for realizing a new nanoscale sensing or actuating device.

Acknowledgements

This work was supported by JSPS KAKENHI Grant Number 26600062 and JKA. A part of this work was supported by Kyoto University Nano Technology Hub in "Nanotechnology Platform Project" sponsored by the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan. The authors would like to thank to Dr. K. Ishikawa and Prof. T. Sumigawa for their help on SEM observation.

References

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