PSI - Issue 40

Available online at www.sciencedirect.com Available online at www.sciencedirect.com ScienceDirect Structural Integrity Procedia 00 (2022) 000 – 000

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ScienceDirect

Procedia Structural Integrity 40 (2022) 40–45

15th International Conference on Mechanics, Resource and Diagnostics of Materials and Structures Deformation field mapping of the X-ray silicon Fresnel Zone Plate A. Barannikov a, *, D. Zverev a , M. Sorokovikov a , M. Korobenkov a , V. Yunkin b , Y. Dudchik c , I. Snigireva d , A. Snigirev a a Immanuel Kant Baltic Federal University, 14 A. Nevskogo, Kaliningrad 236041, Russia

b Institute of Microelectronics Technology RAS, 6 Institutskiy Prospekt, Chernogolovka 142432, Russia c Institute of Applied Physics Problems of Belarus State University,7 Kurchatova, Minsk 220045, Belarus d European Synchrotron Radiation Facility (ESRF), 71 avenue des Martyrs, Grenoble 38043, France

© 2022 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (https://creativecommons.org/licenses/by-nc-nd/4.0) Peer-review under responsibility of the scientific committee of the15th International Conference on Mechanics, Resources and Diagnostics of Materials and Structures. Abstract The characterization of the deformations of the circular Fresnel Zone Plate (FZP) by the X-ray diffraction imaging technique is presented in this paper. The research was performed at the ID06 ESRF beamline using the 12.38 keV radiation energy. During the experiment, the contour map of the FZP deformation field was obtained. This map was used in the reconstruction of the surface curvature profile at three points: at the FZP center, 60 μm, and 120 μm below the FZP center. As result, the FZP with 242 zones has a concave profile in its center and a convex profile near the outermost zones. The inflection points close to the 115 th zone were observed. This technique can be used not only for the characterization of the conventional binary FZP but also for the Multilayer Laue Lenses and FZP with multilevel, and kinoform profiles. The Authors. Published by ELSEVIER B.V. open a cess article under the CC BY-NC-ND license (https://creativecommons.org/licenses/by-nc-nd/4.0) r ie unde responsibility of the scientific committee of e 15th International Conferen e on Mechani s, Resource and Diagnostics of Materials and Structures. Keywords: X-ray Fresnel Zone Plate; X-ray diffraction imaging; Micro Electro Mechanical Systems (MEMS); Synchrotron and X-ray radiation sources; X-ray beam-shaping optics; Stereo images

* Corresponding author. Tel.: +7-909-789-6000. E-mail address: abarannikov95@gmail.com

2452-3216 © 2022 The Authors. Published by ELSEVIER B.V. This is an open access article under the CC BY-NC-ND license (https://creativecommons.org/licenses/by-nc-nd/4.0) Peer-review under responsibility of the scientific committee of the15th International Conference on Mechanics, Resource and Diagnostics of Materials and Structures.

2452-3216 © 2022 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (https://creativecommons.org/licenses/by-nc-nd/4.0) Peer-review under responsibility of the scientific committee of the15th International Conference on Mechanics, Resources and Diagnostics

of Materials and Structures. 10.1016/j.prostr.2022.04.005