PSI - Issue 2_A

Takashi Sumigawa et al. / Procedia Structural Integrity 2 (2016) 1375–1382

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Author name / Structural Integrity Procedia 00 (2016) 000–000

Fig. 3. SEM images of specimen fabricated by FIB.

Fig. 4. Schematic diagram of the system used for the resonant fatigue experiment.

than the previous value. This operation was repeated until a significant change in Δδ 1 was observed. After the fatigue test was terminated, the surfaces of the test section were carefully observed using field emission-SEM (FE SEM). 3. Results and discussion 3.1. Resonant Fatigue At Δ V in /2 ≤ 1.0 V, the deformation amplitude, Δ δ /2, was constant until 10 7 cycles. However, it suddenly decreased before 10 7 cycles at Δ V in /2 = 1.60 V and f 0 shifted after the sudden decrease, which indicated that the change in f 0 induced the rapid decrease of Δ δ 1 /2.